Plasma power required for semiconductor and LCD manufacture.

Phase shifter

Phase shifter

RF phase shifter

 

Phase shifter(PS) controls the phase difference between two RF powers.

By PS, etching process becomes stady when transmitting multi RF powers to vacuum chamber.

The phase difference between two RF powers is shown as the right figure.

 

          Advantage

     ・Deal with multiple channels.

     ・Closed-loop control is used.

     ・Phase delay is prevented.

     ・Remote setting from the outside is enable.

     ・Phase setting range is wide.

 

 

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